EUV damage threshold measurements of Mo/Si multilayer mirrors
نویسندگان
چکیده
منابع مشابه
EUV damage threshold measurements of Mo/Si multilayer mirrors
We present 1-on-1 and 10-on-1 damage threshold investigations on Mo/Si multilayers with EUV radiation of 13.5 nm wavelength, using a table-top laser produced plasma source based on solid gold as target material. The experiments were performed on different types of Mo/Si mirror, showing no significant difference in single pulse damage thresholds. However, the damage threshold for ten pulses is ≈...
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ژورنال
عنوان ژورنال: Applied Physics A
سال: 2012
ISSN: 0947-8396,1432-0630
DOI: 10.1007/s00339-012-7037-9